Semiconductor Applications

Delivering the precision, reliability, and efficiency needed to optimize semiconductor manufacturing processes, reducing downtime, and increasing production.

Increase Speed and Precision, Lower Operational Costs in Semiconductor Manufacturing

Our advanced motion control solutions are designed to meet the rigorous demands of semiconductor manufacturing. Whether you want to increase throughput, enhance accuracy, or reduce maintenance, NSK solutions provide the high-performance and long-term durability needed to keep your semiconductor operations running smoothly and profitably.

Products

Direct Drive Motors for High Torque and Resolution

Key Features of NSK Megatorque Direct Drive Motors

  • High Resolution Over 2.6 million counts per revolution for ultra-precise control.
  • Exceptional Repeatability Provides repeatability of ±2 arc-seconds, ensuring consistent performance.
  • Compact Design Combines speed, accuracy, and torque for optimal performance in space-constrained environments.
  • High Reliability No maintenance required due to life lubricated sealed bearing

Semiconductor Industry Applications

  • Deposition and Etch Applications Accurate, and controlled motion during thin-film deposition and etching processes, allowing for precise layer formation and pattern definition.
  • Positioning and Indexing Delivers remarkable precision for positioning and indexing tasks in assembly and testing.

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AXIS Linear Actuators

Key Features of AXIS Linear Actuator

  • High-Precision Movement: Delivers smooth accurate motion, ideal for demanding applications.
  • Compact and Lightweight Design: Perfect for integration into tight spaces without sacrificing performance.
  • Two Distinct Drive Technologies: NSK’s BMAX is driven by a precision ground ballscrew and LMAX a high force linear motor
  • Flexible, Open-Ended Integration: Servo/stepper motor compatible (BMAX) and universal position feedback (LMAX)

Semiconductor Industry Applications

  • Wafer TransportFacilitates smooth, accurate positioning and handling of wafers in high-speed manufacturing lines.
  • Chip Bonding and PackagingEnhances positioning accuracy in automated chip assembly and packaging applications.

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Bearings For Special Environments (SPACEA)

Key Features of SPACEA Bearings

  • Engineered for Harsh Environments Designed to perform in extreme conditions, including high temperature, vacuum, corrosive, and cleanroom applications.
  • Proven Reliability Ensures long-lasting performance with minimal maintenance, even in the most demanding environments.
  • Versatile Lineup Tailored solutions for a wide variety of specialized semiconductor applications

Semiconductor Industry Applications

  • Vacuum Chambers Delivers exceptional performance in high-vacuum environments crucial to semiconductor manufacturing.
  • Cleanroom Equipment Maintains cleanliness and reliability in sensitive semiconductor production areas where contamination must be avoided.

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Customized Z Lift Solutions with Superior Load Handling

Precision, Stability, and Customization for Z-Axis Actuators

In semiconductor applications requiring precise vertical motion, NSK’s Linear Actuators and Toughcarriers provide optimal solutions for Z lift actuators. Managing heavier loads with greater accuracy, sustained performance, and reliability over time.

Key Features of NSK’s Z-Lift Solutions

  • Compact, Single-Axis Actuators Our linear actuators integrate NSK’s industry-leading ball screws, linear guides, and support bearings into a compact, space-saving design. This ensures highly reliable and precise vertical motion, reducing the need for complex multi-component assemblies and minimizing maintenance in your semiconductor processes.
  • Customization Options Tailored to meet the unique demands of your application, our Linear Actuators offer a wide range of sizes, ball screw leads, and single or dual slider configurations. Combined with an array of standard accessories, this flexibility reduces engineering time and provides seamless integration into your existing systems.
  • Toughcarrier for High-Moment Loads Our Toughcarrier is the ideal solution for demanding applications with high-moment loads. Featuring robust rollers in its linear guide, it delivers unmatched capability, rigidity, and durability. With superior load-bearing capabilities, the Toughcarrier enhances operational efficiency by minimizing downtime and maintenance, making it a cost-effective choice for high-stress environments.

Semiconductor Industry Applications

  • Material Transfer Toughcarriers are ideal for moving heavy components or materials within cleanroom environments, maintaining performance and precision during critical production phases.
  • Test Equipment Positioning Linear Actuators’ compact design allows for efficient positioning of test equipment, optimizing space in testing areas while ensuring high accuracy in measurements.
  • Assembly Automation Both Linear Actuators and Toughcarriers facilitate automated assembly processes, enabling seamless integration into robotics and assembly lines while handling varying load requirements.

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Integrated Subassemblies for Seamless Performance

NSK’s Subassemblies Streamline Operations and Drive Precision

NSK offers turnkey subassemblies that integrate our precision products into fully assembled, tested, and ready-to-install solutions. From design support to cleanroom assembly, we simplify your processes and help you focus on what matters most.

Key Benefits

  • Turnkey Solution: One part number for a fully assembled and tested subassembly, with NSK managing multiple suppliers to save your Purchasing Department time and resources.
  • Simplified Processes: Warranty, QA, and product failure analysis (FA) are all managed by NSK, reducing complexity and streamlining returns and quality control.
  • Design Support: Whether it’s build-to-print or design assistance, we reduce your resource load, allowing your team to stay focused on your core intellectual property.
  • Cleanroom Assembly: Our cleanroom facilities, classified as Class 1000, meet stringent contamination control standards, ensuring subassemblies are suited for critical semiconductor applications.
  • ISO Audited Facility: Our ISO 9001 and ISO 14001 certified facility ensures consistent quality and reliability, reinforcing your confidence in our processes.
  • Leverage NSK Core Products: Our subassemblies incorporate NSK’s full range of precision products, including ball screws, bearings, linear guides, linear actuators, direct drive motors, specialty greases, and coatings.

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Catalogs

PS PN MegaTorque Motor

Download MegaTorque Catalog

Low Profile MegaTorque Motor PN 2012

Low Profile MegaTorque Motor PN

Download Low Profile Catalog

Spacea

NSK Spacea Bearings, Ball Screws and Linear Guides for Special Environments

Download Spacea Catalog

AXIS Actuators

NSK AXIS Actuator

Download AXIS Actuator Catalog

Integrated System Solutions

NSK Integrated System Solutions

Download Integrated Systems Catalog

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